Lithographic masks

 Bernard Azout

Deep engravings (glasses, metals, crystals)

  • Precision of lithographic masks: <1 μm


Realization of optical masks on soda-lime glass (soda-lime) or quartz.

Metal layers: anti-reflective chrome or iron oxide.

Standard sizes: 2.5 “x 2.5” to 16 “x 16”. Resolution: from 1 μm (standard) to 0.1 μm (very high resolution). Masks are defined from plans or computer data (DXF, GDSII …).

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